PART NUMBER | DESCRIPTION | SALES BROCHURE |
Click on Links Below for Photo | COMPLETE RF POWER GENERATION SYSTEMS | Click on links Below for Sales Brochure or Drawing |
00002380 | 300 watt 13.56 MHz RF Power Generation System, including RF power supply, automatic impedance matching network and network power supply/controller. All necessary control and interconnect cables are included. | |
000002379 | 300 watt 13.56 MHz RF Power Generation System, including RF power supply and manually adjusted impedance matching network. All necessary control and interconnect cables are included. | |
00002520 | 600 watt 13.56 MHz RF Power Generation System, including RF power supply, automatic impedance matching network and network power supply/controller. All necessary control and interconnect cables are included. | |
| | |
| RF POWER GENERATORS | |
00002385 | RF-3-XIII 300 watt 13.56 MHz Power Generator with digital controls and LED displays in 19" 1/2 rack air cooled enclosure. | PS 610 07/11 |
00002518 | RF-6-XIII 300 watt 13.56 MHz Power Generator with digital controls and LED displays in 19" 1/2 rack air cooled enclosure. | PS 620 01/12 |
00002390 | RS-232 Serial Port Option | |
| | |
| IMPEDANCE MATCHING NETWORKS | |
00002386 | MN-500 500 watt 13.56 MHz Manually Adjusted Impedance Matching Network. Female N Input Connector and Female HN Output Connector. | MN 110 07/11 |
00002387 | ATN-5 500 watt 13.56 MHz Automatic Impedance Matching Network. Female N Input Connector and Female HN Output Connector. Includes network power supply/controller and P/N 00002389 DB-15 signal interface cable. | MN 210 07/11 |
00002519 | ATN-10 700 watt 13.56 MHz Automatic Impedance Matching Network. Female N Input Connector and Female HN Output Connector. Includes network power supply/controller and P/N 00002389 DB-15 signal interface cable. | MN 220 01/12 |
| | |
| POWER SUPPLY SWITCHES | |
00002391-1 | RF/DC Switch - 1 input, 2 outputs. 100 watts to 4kW. All connectors are female HN. | AC 400 07/11 |
00002383-1 | RF/DC Switch - 1 input, 3 outputs. 100 watts to 4kW. All connectors are female HN. | AC 400 07/11 |
00002392-1 | RF/DC Switch - 1 input, 4 outputs. 100 watts to 4kW. All connectors are female HN. | AC 400 07/11 |
00002384-1 | RF/DC Switch - 2 inputs, 2 outputs per input. 100 watts to 4kW. All connectors are female HN. | AC 400 07/11 |
| | |
| POWER SUPPLY SWITCH REMOTE CONTROLLER | |
00002555 | 19" 1/2 Rack x 1U High Power Supply Switch Remote Controller | AC 400 06/12 |
| | |
| CABLES | |
00000102-1 | RG-393 Cable Assembly, Male HN connectors both ends, 18" long - matching network to sputtering source | 00000102, Rev. C |
00000102-2 | RG-393 Cable Assembly, Male HN connectors both ends, 24" long - matching network to sputtering source | 00000102, Rev. C |
00000102-3 | RG-393 Cable Assembly, Male HN connectors both ends, 36" long - matching network to sputtering source | 00000102, Rev. C |
00000102-4 | RG-393 Cable Assembly, Male HN connectors both ends, 48" long - matching network to sputtering source | 00000102, Rev. C |
00000102-5 | RG-393 Cable Assembly, Male HN connectors both ends, 60" long - matching network to sputtering source | 00000102, Rev. C |
| | |
00000415-4 | RG-213 Cable Assembly, Male N connectors both ends, 8' long - RF power generator to matching network | |
| | |